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技術參數
Scan modules Measuring range in x,y-direction [mm] Resolution in x,y-direction [mm] Positioning range in z-direction [mm] Max. measuring speed [mm/s]
SC 50 50X50 0.5 100 50
SC 100 100x100 0.5 100 50
SC 150 150x150 0.5 100 50
SC 200 200x200 0.5 100 50
other dimensions on request
Sensors Resolution z [μm] Resolution x,y [μm] Working distance [mm] Measuring range in z-direction [mm] Camera (optional)
Confocal point sensor CF 4 0.02 1 4 1.0 off-axis
CF 13 0.02 1 13 1.0 (BMT5)
Autofocus sensor AF 2 0.025/0.0111) 1 2 1.5/0.651) integrated
AF 5 0.025/0.0111) 1 5 1.5/0.651) (BMT3)
Chromatic white light sensor CRT 52) 0.010 4 5 0.3 off-axis (BMT5)
CRT 122) 0.025 4 12 1.0
CRT 162) 0.075 8 16 3.0
Holographic sensor CP 15 3.0 12 12 1.8 integrated
(BMT 4)
CP 42 6.0 15 42 8.0
CP 65 10.0 25 65 18.0
1) with restricted measuring range 2) with 1, 4 or 30 kHz measuring frequency available
Modules
System controller High performance industrial PC, DVD-Writer, network card,
Windows XP Professional
Cabinet and work table MT 70 Stable container for electronic modules with work table
1550x800x750 (lxwxh in mm)
Granite measuring stand MP 100 Portal construction, 660x450x497 (lxwxh in mm) for SC 50 to SC 150
Granite measuring stand MP 200 Portal construction, 680x480x385 (lxwxh in mm) from SC 200
NF μsoft standard software NanoFocus control and evaluation software, profile and topography
representation, roughness calculation compliant with DIN EN ISO
Options
NF 3D-Plus Photo-realistic 3D presentation of topographical data (OpenGL)
NF Active X Interface modules to program individual measurement processes and
calculations (Excel/VBA)
NF Hybridmaster Automation tool for the use of μscan® in thick film production incl. SPC and
teach in module
NF Flatmaster Automated measurement of straightness, flatness and warpage
NF Solder Automated off-line measurement of fine pitch solderpaste print in SMT production
NF AutoScan Automated measurement of profiles and surfaces at arbitrary measurement
points
μScan采用模塊化設計，特點是快速測量、不接觸、不破壞、自動化
μScan的中心部件掃描模塊(x/y方向樣品掃描)可以和不同的傳感器
(Z方向測量)連用，如Confocal point sensor、Autofocus sensor、
Chromatic white light sensor、Holographic sensor等。
AF2 自動對焦（Autofocus)
借由探測器的回饋訊號調整物鏡位置，得到待測物焦點，而獲得待測物的確實高度
CF4 共軛焦（Confocal, Laser)
激光光束經由物鏡迅速上下移動聚焦于待測物上，此時偵測器能經由孔洞得到最大光的強度，如此偵測器根據此訊號確定其位置
應用
集成電路封裝和表面貼片技術
厚膜混合電路:膜厚度的自動化測量
精密部件
